When it comes to the localization of MOCVD, we must first talk about the localization of integrated circuits. In the past five centuries, the state has invested a large amount of manpower and huge funds to realize the localization of key equipment for integrated circuits in several five-year plans. The prototype completed the acceptance of localization, including the most used automatic lithography equipment and ultra-high vacuum evaporation machine in the integrated circuit manufacturing process. However, the equipment used by integrated circuit manufacturers is still imported from overseas, and the online usage rate is still at zero. As for the self-sufficiency rate of the industry, the localization can only be self-deception.
Looking at the equipment used by the current manufacturers of LED chips, and taking ultra-high vacuum coating equipment as an example, all of them are still imported overseas. The online usage rate of the enterprise and the self-sufficiency rate of the localization of the industry are still zero. Domestically produced evaporation equipment like this Used only in research institutes. According to recent statistics, among the key equipment used by Xiamen Sanan Electronics, the largest LED chip manufacturer in China, there are 26 automatic lithography machines, 19 ultra-high vacuum evaporation machines, 9 ICP etching machines, and PECVD media. There are 18 membrane deposition equipment, 22 grinding machines and 5 hard polishing machines. Although these equipments have already been domestically produced, they are still not imported and are still imported equipment. Xiamen Sanan Electronics Co., Ltd. has made great efforts for the localization of these devices. Currently, it is cooperating with some domestic equipment manufacturers. For example, ICP etching equipment manufactured by Northern Microelectronics Co., Ltd. is in trial use, and strive to realize online use as soon as possible. A zero breakthrough in the rate.
For more information, please refer to the July issue of "High-tech LED - Technology and Applications" magazine.
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